CSVTU BE VIII Semester ET&T Microelectronic Devices & VLSI Technology Syllabus

Chhattisgarh Swami Vivekanand Technical University, Bhilai

Semester : VII Branch: Electronics & Telecommunication

Subject: Microelectronic Devices & VLSI Technology

Total Theory Periods: 40 Total Tutorial Periods: 12

Total Marks in End Semester Examination: 80

Minimum number of Class tests to be conducted: Two

UNIT – I

Introduction:

The Historical Prospect of Integrated Circuits, Silicon Wafers, Wafer Terminology.

Crystal Growth: The Czochralski Technique, Bridgeman Technique, Float Zone Process.

UNIT – II

Oxidation:

Thermal Oxidation, Kinetics of Thermal Oxidation, Film Deposition, Dielectric Deposition, Polysilicon

Deposition.

UNIT – III

Diffusion:

Diffusion Mechanics, Diffusion Equation, Diffusion Profile. Ion Implantation:

Implantation Mechanism, Ion

Implantation System, Low Energy Implantation, High Energy Implantation.

UNIT – IV

Epitaxy:

Vapour Phase Epitaxy, Liquid Phase Epitaxy, Molecular Beam Epitaxy. Lithography:

Optical Lithography,

Electron Beam Lithography, X-Ray Lithography, Ion Beam Lithography.

Etching:

Wet Chemical Etching, Reactive

Chemical Etching.

Metallization:

Physical Vapour deposition, Chemical Vapour deposition, Aluminium Metallization,

Metallization with Silicides.

Process Simulation and Integration

UNIT – V

MOSFET Technology:

Introduction, MOS Structure. MOS Transistor: MOSFET Structure, Enhancement MOSFET,

Threshold Voltage, Depletion MOSFET, Operation of MOSFET. MOSFET Characteristics: Gradual Channel

Approximation, Charge Control Model, Velocity Saturation Effects, Channel Length Modulation, Subthreshold region.

MOS Capacitance and Equivalent Circuit. Scaling of MOSFET: Short channel Effects, SPICE model for MOSFETs.

MOSFET Fabrication.

Text Book:

1.

VLSI Design

by Sujata Pandey & Manoj Pandey, Dhanpat Rai & co.

2.

VLSI Technology

, S.M. Sze, TMH Book Company

Reference Book:

1.

VLSI Fabrication Principles

by Sorab K. Gandhi, Wiley & Sons, New York.

2.

Physics & Technology of Semiconductor Devices

by A.S. Grove, Wiley & Sons, New York.

 

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